Mathur, Sanjay and Ruegamer, Thomas (2011). Transparent and Scratch-Resistant C:ZrOx Coatings on Polymer and Glass by Plasma-Enhanced Chemical Vapor Deposition. Int. J. Appl. Ceram. Technol., 8 (5). S. 1050 - 1059. HOBOKEN: WILEY. ISSN 1744-7402
Full text not available from this repository.Abstract
Transparent and scratch-resistant zirconium oxide thin films were deposited in radio-frequency plasma-enhanced chemical vapor deposition process on glass and polycarbonate substrates using zirconium-tetra-tert-butoxide, [Zr((OBu)-Bu-t)(4)], as the precursor. Investigations on film morphology (AFM), thickness (cross-sectional SEM), phase structure (X-ray diffraction), chemical composition (X-ray photoelectron spectroscopy), and optical properties (UV/Vis, ellipsometry) revealed the interplay of process parameters (plasma power, gas composition, deposition time, and precursor flux) on the composition and properties of the coatings. High-quality transparent coatings (> 90%) with a tunable refractive index (n = 1.7-2.1) and abrasion-resistant properties were deposited on both polymer and glass substrates. Despite low deposition temperatures (<100 degrees C), the coatings showed good adherence to the substrate and extraordinary barrier properties that were further improved by depositing intermediary SiOx-layers. Phase analysis of the predominantly amorphous films showed the incipient crystallization of ZrO2.
Item Type: | Journal Article | ||||||||||||
Creators: |
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URN: | urn:nbn:de:hbz:38-489292 | ||||||||||||
DOI: | 10.1111/j.1744-7402.2010.02537.x | ||||||||||||
Journal or Publication Title: | Int. J. Appl. Ceram. Technol. | ||||||||||||
Volume: | 8 | ||||||||||||
Number: | 5 | ||||||||||||
Page Range: | S. 1050 - 1059 | ||||||||||||
Date: | 2011 | ||||||||||||
Publisher: | WILEY | ||||||||||||
Place of Publication: | HOBOKEN | ||||||||||||
ISSN: | 1744-7402 | ||||||||||||
Language: | English | ||||||||||||
Faculty: | Unspecified | ||||||||||||
Divisions: | Unspecified | ||||||||||||
Subjects: | no entry | ||||||||||||
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URI: | http://kups.ub.uni-koeln.de/id/eprint/48929 |
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