Mathur, Sanjay and Ruegamer, Thomas (2011). Transparent and Scratch-Resistant C:ZrOx Coatings on Polymer and Glass by Plasma-Enhanced Chemical Vapor Deposition. Int. J. Appl. Ceram. Technol., 8 (5). S. 1050 - 1059. HOBOKEN: WILEY. ISSN 1744-7402

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Abstract

Transparent and scratch-resistant zirconium oxide thin films were deposited in radio-frequency plasma-enhanced chemical vapor deposition process on glass and polycarbonate substrates using zirconium-tetra-tert-butoxide, [Zr((OBu)-Bu-t)(4)], as the precursor. Investigations on film morphology (AFM), thickness (cross-sectional SEM), phase structure (X-ray diffraction), chemical composition (X-ray photoelectron spectroscopy), and optical properties (UV/Vis, ellipsometry) revealed the interplay of process parameters (plasma power, gas composition, deposition time, and precursor flux) on the composition and properties of the coatings. High-quality transparent coatings (> 90%) with a tunable refractive index (n = 1.7-2.1) and abrasion-resistant properties were deposited on both polymer and glass substrates. Despite low deposition temperatures (<100 degrees C), the coatings showed good adherence to the substrate and extraordinary barrier properties that were further improved by depositing intermediary SiOx-layers. Phase analysis of the predominantly amorphous films showed the incipient crystallization of ZrO2.

Item Type: Journal Article
Creators:
CreatorsEmailORCIDORCID Put Code
Mathur, SanjayUNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Ruegamer, ThomasUNSPECIFIEDUNSPECIFIEDUNSPECIFIED
URN: urn:nbn:de:hbz:38-489292
DOI: 10.1111/j.1744-7402.2010.02537.x
Journal or Publication Title: Int. J. Appl. Ceram. Technol.
Volume: 8
Number: 5
Page Range: S. 1050 - 1059
Date: 2011
Publisher: WILEY
Place of Publication: HOBOKEN
ISSN: 1744-7402
Language: English
Faculty: Unspecified
Divisions: Unspecified
Subjects: no entry
Uncontrolled Keywords:
KeywordsLanguage
THIN-FILMS; OPTICAL-PROPERTIES; ZRO2; SURFACE; CVD; MICROSTRUCTURE; DECOMPOSITION; CHEMISTRY; TINMultiple languages
Materials Science, CeramicsMultiple languages
URI: http://kups.ub.uni-koeln.de/id/eprint/48929

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