Universität zu Köln

Appel, Linus, Fiz, Raquel, Tyrra, Wieland, Pantenburg, Ingo and Mathur, Sanjay (2015). Design of Volatile Mixed-Ligand Tantalum(V) Compounds as Precursors to Ta2O5 Films. Cryst. Growth Des., 15 (3). S. 1141 - 1150. WASHINGTON: AMER CHEMICAL SOC. ISSN 1528-7505

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Abstract

Synthesis and structural characterization of six monomeric, heteroleptic tantalum(V) complexes of the general formula Ta((OPr)-Pr-i)(4)(ArTFP), where Ar = pyridine (1), 4,5- dimethyloxazole (2), 4,5-dimethylthiazole (3), benzimidazole (4), benzoxazole (5), benzthiazole (6), and TFP = trifluoropropenol, are described. Introduction of a donor-functionalized beta-heteroarylalkenolate in the coordination sphere of Ta in the dimeric Ta-2((OPr)-Pr-i)(10) increases significantly the stability and volatility of these precursors, simplifying the depositions of Ta2O5. The molecular structures of 16 exhibited a distorted octahedral coordination around the tantalum center by four isopropoxide groups and one beta-heteroarylalkenolate. Thermal decomposition studies (TG/DTA) and analysis of byproducts by NMR spectroscopy confirmed the decomposition mechanism and gas-phase stability of the heteroleptic compounds necessary for Ta2O5 depositions. Chemical vapor deposition studies with 1 and 2 demonstrated their suitability as efficient precursors for the growth of Ta2O5 thin films, whose properties were compared with Ta2O5 thin films obtained from homoleptic alkoxides.

Item Type:	Journal Article
Creators:	Creators Email ORCID ORCID Put Code Appel, Linus UNSPECIFIED UNSPECIFIED UNSPECIFIED Fiz, Raquel UNSPECIFIED UNSPECIFIED UNSPECIFIED Tyrra, Wieland UNSPECIFIED UNSPECIFIED UNSPECIFIED Pantenburg, Ingo UNSPECIFIED UNSPECIFIED UNSPECIFIED Mathur, Sanjay UNSPECIFIED UNSPECIFIED UNSPECIFIED
URN:	urn:nbn:de:hbz:38-405890
DOI:	10.1021/cg501438k
Journal or Publication Title:	Cryst. Growth Des.
Volume:	15
Number:	3
Page Range:	S. 1141 - 1150
Date:	2015
Publisher:	AMER CHEMICAL SOC
Place of Publication:	WASHINGTON
ISSN:	1528-7505
Language:	English
Faculty:	Faculty of Mathematics and Natural Sciences
Divisions:	Faculty of Mathematics and Natural Sciences > Department of Chemistry > Institute of Inorganic Chemistry
Subjects:	no entry
Uncontrolled Keywords:	Keywords Language CHEMICAL-VAPOR-DEPOSITION; OPTICAL-PROPERTIES; THIN-FILMS; DIELECTRIC APPLICATIONS; ORGANIC-COMPOUNDS; LARGE-SCALE; NIOBIUM; OXIDE; ALKOXIDES; DERIVATIVES Multiple languages Chemistry, Multidisciplinary; Crystallography; Materials Science, Multidisciplinary Multiple languages
Refereed:	Yes
URI:	http://kups.ub.uni-koeln.de/id/eprint/40589