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Sasinska, Alexander, Leduc, Jennifer, Frank, Michael, Czympiel, Lisa, Fischer, Thomas, Christiansen, Silke H. and Mathur, Sanjay (2018). Competitive interplay of deposition and etching processes in atomic layer growth of cobalt and nickel metal films. J. Mater. Res., 33 (24). S. 4241 - 4251. NEW YORK: CAMBRIDGE UNIV PRESS. ISSN 2044-5326