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Journal Article
Engler, Martin 
ORCID: 0000-0002-6593-0677, Frost, Frank, Mueller, Sven, Macko, Sven, Will, Moritz, Feder, Rene ORCID: 0000-0002-5694-5332, Spemann, Daniel, Huebner, Rene, Facsko, Stefan ORCID: 0000-0003-3698-3793 and Michely, Thomas
(2014).
Silicide induced ion beam patterning of Si(001).
Nanotechnology, 25 (11).
BRISTOL:
IOP PUBLISHING LTD.
ISSN 1361-6528