Universität zu Köln

Sobolev, Alexander S., Ilin, Alexey S., Orlov, Andrey P., Bulatov, Nikita O. and Shchukin, Konstantin P. (2022). Thermally Isolated Ruthenium Nanobolometer for Room-Temperature Operation. IEEE Sens. J., 22 (19). S. 18313 - 18318. PISCATAWAY: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. ISSN 1558-1748

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Abstract

We propose a bolometer intended for room-temperature operation and based on a 100-nm-wide ruthenium (Ru) strip fabricated on a thin layer of cross-linked polymethyl methacrylate (XPMMA). This layer provides thermal isolation between the silicon substrate and the Ru nanostrip for increasing the nonlinearity of the bolometer I- V curve due to more intensive self-heatingby the biasing and an ac current. A number of bolometers with Ru strips of different dimensions and different thicknesses of XPMMA layer were fabricated and tested at dc. An estimate based on the dc tests gives the electrical voltage responsivity to radio frequency (RF) signal as much as 250 V/W, which makes the proposed bolometer attractive as a sensing element for a simple and low-cost microwave and terahertz detector. Numerical simulations of temperature distribution along the Ru strip and analysis of the bolometer noise performance are also presented.

Item Type:	Journal Article
Creators:	Creators Email ORCID ORCID Put Code Sobolev, Alexander S. UNSPECIFIED UNSPECIFIED UNSPECIFIED Ilin, Alexey S. UNSPECIFIED UNSPECIFIED UNSPECIFIED Orlov, Andrey P. UNSPECIFIED UNSPECIFIED UNSPECIFIED Bulatov, Nikita O. UNSPECIFIED UNSPECIFIED UNSPECIFIED Shchukin, Konstantin P. UNSPECIFIED UNSPECIFIED UNSPECIFIED
URN:	urn:nbn:de:hbz:38-680539
DOI:	10.1109/JSEN.2022.3199988
Journal or Publication Title:	IEEE Sens. J.
Volume:	22
Number:	19
Page Range:	S. 18313 - 18318
Date:	2022
Publisher:	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Place of Publication:	PISCATAWAY
ISSN:	1558-1748
Language:	English
Faculty:	Unspecified
Divisions:	Unspecified
Subjects:	no entry
Uncontrolled Keywords:	Keywords Language MICROBOLOMETERS; ARRAY Multiple languages Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied Multiple languages
URI:	http://kups.ub.uni-koeln.de/id/eprint/68053