Forster, Daniel F. ORCID: 0000-0002-7267-9126, Bleikamp, Sebastian and Michely, Thomas
(2010).
Biaxially textured Ag films by grazing ion beam assisted deposition.
Thin Solid Films, 519 (2).
S. 598 - 605.
LAUSANNE:
ELSEVIER SCIENCE SA.
ISSN 0040-6090
Abstract
The effect of grazing incidence 4 key Ar+ ion irradiation on the early stage of Ag thin film growth on amorphous Si was investigated The double effect of axial and surface channeling resulted in grains oriented along the < 110 > axis in-plane while the (111) out-of-plane texture was maintained A slight average tilt of the (111) out-of-plane texture axis towards the ion beam direction is proposed to result from the difference between terrace and step edge sputtering yield The observed tilt is consistent with a minimum erosion orientation of the surface profile (C) 2010 Elsevier B V All rights reserved
Item Type: | Journal Article | ||||||||||||||||
Creators: |
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URN: | urn:nbn:de:hbz:38-494028 | ||||||||||||||||
DOI: | 10.1016/j.tsf.2010.06.007 | ||||||||||||||||
Journal or Publication Title: | Thin Solid Films | ||||||||||||||||
Volume: | 519 | ||||||||||||||||
Number: | 2 | ||||||||||||||||
Page Range: | S. 598 - 605 | ||||||||||||||||
Date: | 2010 | ||||||||||||||||
Publisher: | ELSEVIER SCIENCE SA | ||||||||||||||||
Place of Publication: | LAUSANNE | ||||||||||||||||
ISSN: | 0040-6090 | ||||||||||||||||
Language: | English | ||||||||||||||||
Faculty: | Unspecified | ||||||||||||||||
Divisions: | Unspecified | ||||||||||||||||
Subjects: | no entry | ||||||||||||||||
Uncontrolled Keywords: |
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URI: | http://kups.ub.uni-koeln.de/id/eprint/49402 |
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