Universität zu Köln

Forster, Daniel F. ORCID: 0000-0002-7267-9126, Bleikamp, Sebastian and Michely, Thomas (2010). Biaxially textured Ag films by grazing ion beam assisted deposition. Thin Solid Films, 519 (2). S. 598 - 605. LAUSANNE: ELSEVIER SCIENCE SA. ISSN 0040-6090

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Abstract

The effect of grazing incidence 4 key Ar+ ion irradiation on the early stage of Ag thin film growth on amorphous Si was investigated The double effect of axial and surface channeling resulted in grains oriented along the < 110 > axis in-plane while the (111) out-of-plane texture was maintained A slight average tilt of the (111) out-of-plane texture axis towards the ion beam direction is proposed to result from the difference between terrace and step edge sputtering yield The observed tilt is consistent with a minimum erosion orientation of the surface profile (C) 2010 Elsevier B V All rights reserved

Item Type:	Journal Article
Creators:	Creators Email ORCID ORCID Put Code Forster, Daniel F. UNSPECIFIED orcid.org/0000-0002-7267-9126 UNSPECIFIED Bleikamp, Sebastian UNSPECIFIED UNSPECIFIED UNSPECIFIED Michely, Thomas UNSPECIFIED UNSPECIFIED UNSPECIFIED
URN:	urn:nbn:de:hbz:38-494028
DOI:	10.1016/j.tsf.2010.06.007
Journal or Publication Title:	Thin Solid Films
Volume:	519
Number:	2
Page Range:	S. 598 - 605
Date:	2010
Publisher:	ELSEVIER SCIENCE SA
Place of Publication:	LAUSANNE
ISSN:	0040-6090
Language:	English
Faculty:	Unspecified
Divisions:	Unspecified
Subjects:	no entry
Uncontrolled Keywords:	Keywords Language YBCO-COATED CONDUCTORS; PULSED-LASER DEPOSITION; THIN-FILMS; IBAD-MGO; CHARGED PARTICLES; SURFACE-ENERGY; BOMBARDMENT; GROWTH; SILVER; MICROSTRUCTURE Multiple languages Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter Multiple languages
URI:	http://kups.ub.uni-koeln.de/id/eprint/49402